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Cliff Knollenberg

Contact Information

Office:

Paul G. Allen 136

Contact Cliff Knollenberg by email

About

Lab Organization(s):

SNF

Role:

Process Engineer - Litho

Technical Liaison for:

Etching, MEMS, Optics, Process integration

Trainer for

ASML PAS 5500/60 i-line Stepper (asml)

Blue M Oven (bluem)

EV Group Wafer Bonder (evbond)

EVG 101 Spray Coater (evgspraycoat)

Flexus 2320 Stress Tester (stresstest)

Headway Manual Resist Spinner (headway2)

HMDS Vapor Prime Oven, YES (yes)

Laurell Manual Resist Spinner (laurell-R)

Lithography Solvent Bench (lithosolv)

Nanospec 3 (nanospec3)

Ultraviolet Photoresist Cure (uvcure)

Wet Bench Miscellaneous (wbmiscres)

White Oven (white-oven)

Backup trainer for

110°C Oven (oven110)

90°C Oven (oven90)

Ex Fab Solvent Wet Bench (wbexfab_solv)

Headway 3 Manual Resist Spinner (headway3)

HMDS Vapor Prime Oven, YES2 (yes2)

Karl Suss MA-6 Contact Aligner 1 (karlsuss)

Karl Suss MA-6 Contact Aligner 2 (karlsuss2)

Nanospec 210XP (nanospec2)

Oxford Dielectric Etcher (oxford-rie)

Oxford III-V etcher (Ox-35)

Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)

Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)

Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)

PlasmaTherm Versaline HDP CVD System (hdpcvd)

Reflectance Spectrometer Filmetrics F40 (filmetrics)

Samco PC300 Plasma Etch System (samco)

STS Deep RIE Etcher (stsetch)

SVG Develop Track 1 (svgdev)

SVG Develop Track 2 (svgdev2)

SVG Resist Coat Track 1 (svgcoat)

SVG Resist Coat Track 2 (svgcoat2)

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