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PlasmaTherm Versaline HDP CVD System (hdpcvd)

Overview

Cleanliness: 
All

Processing Technique(s)

Capabilities and Specifications

Cleaning Required: 
Special: See Notes
Material Thickness Range: 500.0 Å - 4.0 μm
Process Temperature Range: 
50 °C - 150 °C
Maximum Load: 
1
Notes: 

To maintain cleanliness level there are cleans required for both the chamber and wafers prior to processing -

Substrates in clean category: Pre-Diffusion Clean

For semi-clean substrates: Standard Metal Clean (SRS100 + PRS1000) .  Run Chamber clean (no dummies) and conditioning with clean dummies prior to run

Lab Organization, Location, and Badger Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
Badger Area: 
SNF: Chemical Vapor Deposition
Badger ID: 
hdpcvd

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Training Charges: 
1.00 hours
Primary Trainer: 
Lavendra Mandyam
Backup Trainer(s): 
Cliff Knollenberg
Primary Maintenance: 
Elmer Enriquez
Backup Maintenance: 
Mike Dickey

Steps to become a tool user

  1. Become a member of SNF.
  1. We do not have a staff member assigned to training on it at this time.  What we suggest is that labmembers wanting training on the tool contact a trained research group co-worker or other trained labmember for training and/or shadowing.  Once the 'trainee' is comfortable in the use of the tool they contact the responsible Process Staff member for badger qualification.  This is done with the understanding that the newly trained labmember may be approached for training eventually.If you cannot find someone to train you after looking at history in badger please contact the responsible Process Staff member and a trainer will be identified.The labmember is responsible for having read and understood any and all documentation related to the tool. A Training Check List is included in these Operating Instructions. It can be a good tool to make sure everything has been covered in the shadowing session.Please print and fill out this Shadowing Form. After the session give the form to the responsible staff member for qualification.
  2. Check the training calendar for any scheduled training:
    .
  3. Contact the primary trainer,
    , to sign up for the training or to schedule a training if none is scheduled.
  4. Read the relevant operating procedures:
  5. Attend the training session and get qualified.