Samco PC300 Plasma Etch System (samco)
Capabilities and Specifications
Primary Materials Etched
Primary Materials Etched:
Process Temperature Range:
Four 4" wafers or two 6" wafers and one 8" wafer
Lab Organization, Location, and Badger Information
Training and Maintenance
Steps to become a tool user
Read the relevant operating procedures:
**ALL SHADOWING MUST BE APPROVED BY SNF STAFF BEFORE SHADOWING SESSION AS PART OF NEW NORMAL POLICIES** Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists
. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form
on clean room paper.