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Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)

Overview

photo of ptmtl in SNF Cleanroom

The Versaline LL-ICP Metal Etcher was acquired in late 2011 for precision metal etching on a flexible range of substrate types.

Cleanliness: 
Flexible

Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 
1
Notes: 

Single wafer; Default 4" config; Can be converted to 6" config; pieces need to be attached to carrier wafer; Restrictions: Can not etch metals or metal oxides with no volatile by-products (shorting & arcing issues)

Lab Facility, Location, and Badger Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
Badger Area: 
SNF: Dry Etching
Badger ID: 
PT-MTL

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Training Charges: 
1.50 hours
Primary Trainer: 
Lavendra Yadav Mandyam
Backup Trainer(s): 
Cliff Knollenberg
Primary Maintenance: 
Elmer Enriquez
Backup Maintenance: 
Mike Dickey

Steps to become a tool user

  1. Become a member of SNF.
  1. This training is common for both PT-MTL and PT-OX.
  2. Check the training calendar to for any scheduled training:
    .
  3. Contact the primary trainer,
    , to sign up for the training or to schedule a training if none is scheduled.
  4. Read the relevant operating procedures before the training session.
  5. Online training and completing the quiz is required. See Online training required. Open Online Course for general information about the online training. for general information about the online training.
    Go to  Go to Online Nano Course Login to log in directly to the course. to log in directly to the course. Go to "nano@stanford" and then to the "PlasmaTherm Etchers Guide" section for watching the video and taking the quiz. For optional overview of plasma etching and how to choose an etcher, go to the "Dry Etching" Section for the three videos on plasma etching principles and "Choosing a Dry Etching Process" section for guidelines for choosing the right equipment.
  6. Complete the quiz on equipment operations.  Attend the training to get qualified.