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Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)

Overview

photo of ptmtl in SNF Cleanroom

The Versaline LL-ICP Metal Etcher was acquired in late 2011 for precision metal etching on a flexible range of substrate types.

Cleanliness: 

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 
1
Notes: 

Single wafer; Default 4" config; Can be converted to 6" config; pieces need to be attached to carrier wafer; Restrictions: Can not etch metals or metal oxides with no volatile by-products (shorting & arcing issues)

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Training Charges: 
1.50 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. This training is common for both PT-MTL and PT-OX.
  2. Check the training calendar to for any scheduled training: .
  3. Contact the primary trainer, , to sign up for the training or to schedule a training if none is scheduled.
  4. Read the relevant operating procedures before the training session.
  5. Complete the quiz on equipment operations.  Attend the training to get qualified.