Equipment name & Badger ID | Technique | Cleanliness | Material Thickness Range | Materials Lab Supplied | Minimum Resolution | Exposure Wavelength | Mask Size | Max Exposure Area | Resist | Objective Separation | Process Temperature Range | Chemicals | Gases | Sample Size Limits | Resolution Notes | Substrate Size | Substrate Type | Maximum Load |
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Aixtron MOCVD - III-N system aix-ccs |
Clean (MOCVD) |
0 -
5 μm
|
|
|
400 °C - 1300 °C
|
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4"x1, 2"X3, pieces | |||||||||||
AJA Evaporator aja-evap |
Flexible |
0 -
300 nm
|
|
|
|
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4"x3 or 6"x1 wafers or pieces | |||||||||||
AJA2 Evaporator aja2-evap |
Semiclean |
0 -
300 nm
|
|
|
|
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4"x3 or 6"x1 wafers or pieces | |||||||||||
Alphastep 500 Profilometer alphastep |
Flexible |
|
|
|
|
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1 | |||||||||||
ASML PAS 5500/60 i-line Stepper asml |
All |
|
|
365 nm | 5 inch |
|
|
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DISCO Wafer Saw DISCO wafersaw |
Flexible |
|
|
|
|
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1x4", 1x6" or 1x8" wafer, or pieces | |||||||||||
EV Group Contact Aligner evalign |
All |
|
|
350 - 450 nm | 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch |
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one piece or wafer | ||||||||
EV Group Wafer Bonder evbond |
Flexible |
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|
|
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EVG 101 Spray Coater evgspraycoat |
All |
|
|
|
|
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1 | |||||||||||
Fiji 2 ALD fiji2 |
Flexible |
1 Å -
50 nm
|
|
|
24 °C - 350 °C
|
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Finetech Lambda flipchipbonder |
Flexible |
|
|
|
°C - 400 °C
|
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1 | |||||||||||
Flexus 2320 Stress Tester stresstest |
All |
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|
|
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1 | |||||||||||
Headway Manual Resist Spinner headway2 |
All |
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one piece or wafer | |||||||||||
Heidelberg MLA 150 heidelberg |
All |
|
|
405 nm |
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1 | ||||||||||
Heidelberg MLA 150 - 2 heidelberg2 |
All |
|
|
375 nm |
|
|
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1 | ||||||||||
HMDS Vapor Prime Oven, YES yes |
All |
|
|
|
150 ºC
|
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Karl Suss MA-6 Contact Aligner 1 karlsuss |
All |
|
|
365 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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|
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Karl Suss MA-6 Contact Aligner 2 karlsuss2 |
All |
|
|
365 nm or 405 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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Keyence Digital Microscope VHX-6000 keyence |
All |
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Lakeshore Hall Measurement System LakeshoreHall |
All |
100 μm -
1000 μm
|
|
|
-258 °C - 1000 °C
|
8 in wafer |
Sensor Transducer Size is 14 mm diameter |
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1 piece |