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SPR 955 CM-.7 resist

Partial words okay.
Equipment name & Badger ID Training Required & Charges Cleanliness Location Chemicals Notes
Headway Manual Resist Spinner
headway2
Resist Coat (manual) Headway Manual Training
1.00 hours
SNF Cleanroom Paul G Allen L107

Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists

Laurell Manual Resist Spinner
laurell-R
Laurell Manual Resist Spinner Training
1.00 hours
SNF Cleanroom Paul G Allen L107

SU-8, LOL, Ebeam resists allowed. No Acetone allowed. 

SVG Resist Coat Track 2
svgcoat2
SVG Resist Coat Tracks 1 and 2 Training
1.25 hours
SNF Cleanroom Paul G Allen L107

Automatic HMDS, Resist spinning, and Bake. AZ5214IR Image Reversal.

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