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Uli Thumser

Contact Information

Phone:

(650)725-3694

Office:

Paul G. Allen 143

Email:

uthumser@stanford.edu

About

Lab Organization(s):

SNF

Role:

Process Engineer - Benches/Litho

Uli is the wet bench lady who keeps everyone safe while using wet chemicals.

Trainer for

Alphastep 500 Profilometer (alphastep)

Karl Suss MA-6 Contact Aligner 1 (karlsuss)

Karl Suss MA-6 Contact Aligner 2 (karlsuss2)

Mask Scrubber (masksrub)

Prometrix Resistivity Mapping System (prometrix)

Sensofar S-neox (s-neox)

SPTS uetch vapor etch (uetch)

SVG Develop Track 1 (svgdev)

SVG Develop Track 2 (svgdev2)

SVG Resist Coat Track 1 (svgcoat)

SVG Resist Coat Track 2 (svgcoat2)

Tencor P2 Profilometer (p2)

Tousimis Automegasamdri-915B Critical Point Dryer (cpd)

Wet Bench Clean 1 (wbclean-1)

Wet Bench Clean 2 (wbclean-2)

Wet Bench Clean_res- hotphos (wbclean_res-hotphos)

Wet Bench Clean_res-hf (wbclean_res-hf)

Wet Bench Clean_res-piranha (wbclean_res-piranha)

Wet Bench CMOS Metal (wbclean3) (wbclean3)

Wet Bench Decontamination (wbdecon)

Wet Bench Flexcorr 1 (wbflexcorr-1)

Wet Bench Flexcorr 2 (wbflexcorr-2)

Wet Bench Flexcorr 3 (wbflexcorr-3)

Wet Bench Flexcorr 4 (wbflexcorr-4)

Wet Bench Flexible Solvents (wbflexsolv)

Wet Bench Flexible Solvents 1 (wbflexsolv-1)

Wet Bench Flexible Solvents 2 (wbflexsolv-2)

Wet Bench Resist Strip (wbresstrip-1)

Backup trainer for

Ex Fab Develop Wet Bench (wbexfab_dev)

Flexus 2320 Stress Tester (stresstest)

Gasonics Aura Asher (gasonics)

HMDS Vapor Prime Oven, YES (yes)

HMDS Vapor Prime Oven, YES2 (yes2)

Lithography Solvent Bench (lithosolv)

Matrix Plasma Resist Strip (matrix)

Nanospec 210XP (nanospec2)

Nanospec 3 (nanospec3)

Oven 110°C post-bake (oven110)

Oven 90°C prebake (oven90)

Wet Bench Miscellaneous (wbmiscres)

White Oven (white-oven)

Xactix Xenon Difluoride Etcher (xactix)