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Stanford Nanofabrication Facility
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Uli Thumser
Contact Information
Phone:
(650)725-3694
Office:
Paul G. Allen 143
Email:
uthumser@stanford.edu
About
Lab Organization(s):
SNF
Role:
Process Engineer - Benches/Litho
Uli is the wet bench lady who keeps everyone safe while using wet chemicals.
Trainer for
Aligner Contact Karl Suss MA-6 (karlsuss)
Karl Suss MA-6 Contact Aligner (karlsuss2)
Mask Scrubber (masksrub)
Profilometer Alphastep 500 (alphastep)
Profilometer AlphaStep D-300 (alphastep2)
Prometrix Resistivity Mapping System (prometrix)
Sensofar S-neox (s-neox)
SPTS uetch vapor etch (uetch)
SVG Develop Track 1 (svgdev)
SVG Develop Track 2 (svgdev2)
SVG Resist Coat Track 1 (svgcoat)
SVG Resist Coat Track 2 (svgcoat2)
Tencor P2 Profilometer (p2)
Tousimis Automegasamdri-915B Critical Point Dryer (cpd)
Wet Bench Clean 1 (wbclean-1)
Wet Bench Clean 2 (wbclean-2)
Wet Bench Clean_res- hotphos (wbclean_res-hotphos)
Wet Bench Clean_res-hf (wbclean_res-hf)
Wet Bench Clean_res-piranha (wbclean_res-piranha)
Wet Bench CMOS Metal (wbclean3)
Wet Bench Decontamination (wbdecon)
Wet Bench Flexcorr 1 (wbflexcorr-1)
Wet Bench Flexcorr 2 (wbflexcorr-2)
Wet Bench Flexcorr 3 (wbflexcorr-3)
Wet Bench Flexcorr 4 (wbflexcorr-4)
Wet Bench Flexible Solvents (wbflexsolv)
Wet Bench Flexible Solvents 1 (wbflexsolv-1)
Wet Bench Flexible Solvents 2 (wbflexsolv-2)
Wet Bench Resist Strip (wbresstrip-1)
Backup trainer for
Ex Fab Develop Wet Bench (wbexfab_dev)
Flexus 2320 Stress Tester (stresstest)
Gasonics Aura Asher (gasonics)
HMDS Vapor Prime Oven, YES (yes)
HMDS Vapor Prime Oven, YES2 (yes2)
Lithography Solvent Bench (lithosolv)
Matrix Plasma Resist Strip (matrix)
Nanospec 210XP (nanospec2)
Nanospec 3 (nanospec3)
Oven (White) (white-oven)
Oven 110°C post-bake (oven110)
Oven 90°C prebake (oven90)
Wet Bench Miscellaneous (wbmiscres)
Xactix Xenon Difluoride Etcher (xactix)