Equipment name & Badger ID | Technique | Cleaning Required | Cleanliness | Material Thickness Range | Materials Lab Supplied | Materials User Supplied | Minimum Resolution | Exposure Wavelength | Mask Size | Max Exposure Area | Resist | Objective Separation | Process Temperature Range | Chemicals | Gases | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
AJA Evaporator aja-evap |
Flexible |
0 -
300 nm
|
|
|
|
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4"x3 or 6"x1 wafers or pieces | |||||||||||
AJA2 Evaporator aja2-evap |
Semiclean |
0 -
300 nm
|
|
|
|
, , , , , |
4"x3 or 6"x1 wafers or pieces | |||||||||||
AllWin 610 RTA aw610_l |
Pre-Diffusion Clean | Clean |
|
|
|
21 °C - 1150 °C
|
, , |
1 wafer | ||||||||||
AllWin 610 RTA (aw610_r) aw610_r |
Flexible |
|
|
|
21 °C - 1150 °C
|
, , |
||||||||||||
Alphastep 500 Profilometer alphastep |
Flexible |
|
|
|
|
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1 | |||||||||||
ASML PAS 5500/60 i-line Stepper asml |
All |
|
|
365 nm | 5 inch |
|
|
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EV Group Contact Aligner evalign |
All |
|
|
350 - 450 nm | 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch |
|
|
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one piece or wafer | ||||||||
EVG 101 Spray Coater evgspraycoat |
All |
|
|
|
|
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1 | |||||||||||
Fiji 1 ALD fiji1 |
Semiclean |
1 Å -
50 nm
|
|
|
24 °C - 350 °C
|
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Fiji 2 ALD fiji2 |
Flexible |
1 Å -
50 nm
|
|
|
24 °C - 350 °C
|
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||||||||||||
Fiji 3 ALD fiji3 |
Flexible |
1 Å -
50 nm
|
|
|
24 °C - 350 °C
|
, , |
||||||||||||
Finetech Lambda flipchipbonder |
Flexible |
|
|
|
°C - 400 °C
|
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1 | |||||||||||
Flexus 2320 Stress Tester stresstest |
All |
|
|
|
|
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1 | |||||||||||
Headway Manual Resist Spinner headway2 |
All |
|
|
|
|
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one piece or wafer | |||||||||||
Heidelberg MLA 150 heidelberg |
All |
|
|
405 nm |
|
|
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1 | ||||||||||
Heidelberg MLA 150 - 2 heidelberg2 |
All |
|
|
375 nm |
|
|
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1 | ||||||||||
HMDS Vapor Prime Oven, YES yes |
All |
|
|
|
150 ºC
|
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||||||||||||
Innotec Evaporator Innotec |
Flexible |
|
|
|
|
, , |
22 four inch wafers | |||||||||||
Intlvac Evaporation Intlvac_evap |
Clean, Semiclean |
0 -
1 μm
|
|
|
|
, , |
12 4 inch wafers, 2 6 inch wafers | |||||||||||
Karl Suss MA-6 Contact Aligner 1 karlsuss |
All |
|
|
365 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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