The SNF and ExFab facilities provide characterization equipment that is used for fabrication process development and analysis as well as some electrical device characterization.
Step height measurement range 500 Å to 80 µm
non contact 3D optical profiling
3 Probe Heads for different cleanliness groups.
500Å to 300µm
Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Ã