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Stanford Nanofabrication Facility
Lab User Guide
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Overview
Lab Manual
1.0 General Policies
2.0 Getting Around
3.0 Safety for All
4.0 General Chemical Safety
5.0 Appendices
Safety Training
SDS
Mavericks (ExFab Room 155) Policies
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Face shield cleaning using steamer
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Equipment
Equipment Name Table
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Equipment
Equipment Name Table
Characterization Equipment
CVD Equipment
Doping Equipment
Dry Etch Equipment
Metallization Equipment
Oxidation and Annealing Equipment
Photolithography Equipment
Wet Bench Equipment
Operating Instructions
Keyence Manual
Related Documentation
Nano Nugget(s)
Tips- Using Keyence for X-sectional Imaging
PROM Request(s)
Characterization of Powders Using Keyence Microscope
Keyence Digital Microscope VHX-6000 (keyence)
Cleanliness:
All
Processing Technique(s)
Characterization
>
Surface Analysis
>
Microscopy
Capabilities and Specifications
Process Temperature Range:
Substrate Type
Silicon
Silicon Germanium
Quartz
Sapphire
Glass
Germanium
Gallium Nitride
III-V
Gallium Arsenide
Substrate Sizes
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
Lab Organization, Location, and Badger Information
Lab Organization:
(SNF Exfab)
Location:
SNF Exfab Paul G Allen 104 Stinson
Badger Area:
nSiL: L104 Stinson
Badger ID:
keyence
Training and Maintenance
Lab Facility:
SNF Exfab
Training Charges:
0.50 hours
Primary Trainer:
Graham Ewing
Primary Maintenance:
Graham Ewing
Steps to become a tool user
Become a
member of SNF
.
Contact the primary trainer:
Graham Ewing
Operating Instructions
Keyence Manual