Skip to content
Skip to navigation
SUNetID Login
SUNetID Login
Stanford Nanofabrication Facility
SNF is open under
New Normal Rules
. ANY shadowing must be coordinated with SNF staff first.
Lab User Guide
Navigation menu
Guide Main Menu
SNF Home
Techniques
Overview
Processing Techniques
Projects
Nano Nuggets
Processes
Runsheets
Safety
Overview
New Normal
Safety Policies
Safety Training
SDS
Camera Policies
Training
Overview
Training Calendar
Training Course Online
Training Shadowing Form
Training Videos
Materials
Overview
Cleanliness Groups
New Process or Material Requests (PROM)
Chemicals List
Materials List
Gases List
Useful Links
Overview
Wafer Dopant and Resistivity Specs
SNF Badger Accounts
Events
News
Discussion Lists*
Community Bulletin Board
External Links
Archive of previous wiki
Contacts*
Equipment
Equipment Table
Characterization Equipment
CVD Equipment
Doping Equipment
Dry Etch Equipment
Metallization Equipment
Photolithography Equipment
Wet Bench Equipment
New Normal Policies
Equipment
Equipment Table
Characterization Equipment
CVD Equipment
Doping Equipment
Dry Etch Equipment
Metallization Equipment
Photolithography Equipment
Wet Bench Equipment
Operating Instructions
Keyence Manual
Related Documentation
Nano Nugget(s)
Tips- Using Keyence for X-sectional Imaging
PROM Request(s)
Characterization of Powders Using Keyence Microscope
Keyence Digital Microscope VHX-6000 (keyence)
Cleanliness:
All
Processing Technique(s)
Characterization
>
Surface Analysis
>
Microscopy
Capabilities and Specifications
Process Temperature Range:
Substrate Type
Silicon
Silicon Germanium
Quartz
Sapphire
Glass
Germanium
Gallium Nitride
III-V
Gallium Arsenide
Substrate Sizes
Pieces
2 inch wafer
3 inch wafer
4 inch wafer
6 inch wafer
Lab Facility, Location, and Badger Information
Lab Organization:
(SNF Exfab)
Location:
SNF Exfab Paul G Allen 104 Stinson
Badger Area:
nSiL: L104 Stinson
Badger ID:
keyence
Training and Maintenance
Lab Facility:
SNF Exfab
Training Charges:
0.50 hours
Primary Trainer:
Graham Ewing
Primary Maintenance:
Graham Ewing
Steps to become a tool user
Become a
member of SNF
.
Contact the primary trainer:
Graham Ewing
.
Operating Instructions
Keyence Manual
Printer-friendly version