Skip to content Skip to navigation

micromanipulator6000 IV-CV probe station (micromanipulator6000)

Overview

Micromanipulator6000 is a four-probe electrical test station. With a Keysight B1500A Semiconductor Device Analyzer, it is capable of both I-V (Current-Voltage) and C-V (Capacitance-Voltage) measurements.

What the Tool CAN do

  •  Easy and fast yet accurate IV and CV measurements by automated connection change by the SCUU: SMU3 and SMU4 are switched between IV and CV measurement modes automatically by SCUU, while SMU1 and SMU2 can be used for IV measurement only
  •  IV measurement resolution 30 pA with SMU3 and SMU4 (100 pA with SMU1 and SMU2), CV measurement resolution 0.3 pF
  • 100 V DC bias due to the addition of SCUU; Up to 250 mVrms signal level; CV measurement in multi frequency from 1 kHz to 5 MHz with minimum 1 mHz frequency resolution
Cleanliness: 
All

Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 
1x4" wafer

Lab Facility, Location, and Badger Information

Lab Organization: 
Stanford Nanofabrication Facility (SNF)
Location: 
SNF Exfab Paul G Allen 151 Ocean
Badger Area: 
nSiL: 151 Ocean
Badger ID: 
micromanipulator6000

Training and Maintenance

Lab Facility: 
SNF
Training Charges: 
0.50 hours
Primary Trainer: 
Swaroop Kommera
Primary Maintenance: 
Jim Haydon
Backup Maintenance: 
Graham Ewing

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  3. Contact the primary trainer:
    for final qualification.

Operating Instructions

micromanipulator6000