micromanipulator6000 IV-CV probe station (micromanipulator6000)
Overview
Micromanipulator6000 is a four-probe electrical test station. With a Keysight B1500A Semiconductor Device Analyzer, it is capable of both I-V (Current-Voltage) and C-V (Capacitance-Voltage) measurements.
What the Tool CAN do
- Easy and fast yet accurate IV and CV measurements by automated connection change by the SCUU: SMU3 and SMU4 are switched between IV and CV measurement modes automatically by SCUU, while SMU1 and SMU2 can be used for IV measurement only
- IV measurement resolution 30 pA with SMU3 and SMU4 (100 pA with SMU1 and SMU2), CV measurement resolution 0.3 pF
- 100 V DC bias due to the addition of SCUU; Up to 250 mVrms signal level; CV measurement in multi frequency from 1 kHz to 5 MHz with minimum 1 mHz frequency resolution
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Substrate Type
Substrate Sizes
Maximum Load:
1x4" wafer
Lab Organization, Location, and Badger Information
Lab Organization:
Location:
Badger Area:
nSiL: 151 Ocean
Badger ID:
micromanipulator6000
Training and Maintenance
Lab Facility:
Training Charges:
0.50 hours
Primary Trainer:
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Contact the primary trainer: Swaroop Kommera
