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LEI1500 Contactless Sheet Resistance Mapping (eddycurrent)

Overview

The LEI1500 Eddy current system measures sheet conductance (mhos/square) as a proportional DC voltage, before and after moving the sample under the sensing coil with magnetic field. This allows contactless measurement of Sheet Resistance by Eddy current. It measures bulk samples or films of sheet resistance from below 0.1ohm/sqr to above 3000ohm/sqr on high resistivity substrates within 900um thickness. Sample size up to 8” wafers, Sensor Transducer Size 14 mm diameter (spot size)

Cleanliness: 

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 
1 wafer(2" to 8")

Lab Facility, Location, and Badger Information

Lab Organization: 
Badger Area: 
Badger ID: 
eddycurrent

Training and Maintenance

Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Contact the primary trainer: for tranining schedule.