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AJA Evaporator (aja-evap)


The AJA e-beam evaporator can be used to directionally deposit various metals. Controllably evaporate a variety of materials, with automatic shutter closing at the defined end thickness. Evaporate Ti, SiO2, Al2O3, Au, Fe, Cr, Ni, Ag, Pt, Al, Pd, NiO, Cu, TiO2, Nb2O5, Ge, Hf,  et al. Please check the up-to-date list in Badger comments. Evaporate onto pieces, up to 3 4" wafers, or a 6" wafer, which are transferred into the chamber via a load lock.  


Capabilities and Specifications

Material Thickness Range: 0.0 - 300.0 nm
Process Temperature Range: 
Maximum Load: 
4"x3 or 6"x1 wafers or pieces

For more than 300nm deposition, please contact Graham Ewing<> in advance

Lab Organization, Location, and Badger Information

Lab Organization: 
Badger Area: 
nSiL: 155A Venice
Badger ID: 

Training and Maintenance

Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Sign up for the relevant training scheduled in .
  4. Contact the primary trainer: for a written test and then schedule the final group training.

two shadowing sessions and a written test before training with tool owner

Operating Instructions