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AJA Evaporator (aja-evap)


The AJA e-beam evaporator can be used to directionally deposit various metals. Controllably evaporate a variety of materials, with automatic shutter closing at the defined end thickness. Evaporate Ti, SiO2, Al2O3, Au, Fe, Cr, Ni, Ag, Pt, Al, Pd, NiO, Cu, TiO2, Nb2O5, Ge, Hf,  et al. Please check the up-to-date list in Badger comments. Evaporate onto pieces, up to 3 4" wafers, or a 6" wafer, which are transferred into the chamber via a load lock.  


Capabilities and Specifications

Lab Organization, Location, and Badger Information

Lab Organization: 
Badger Area: 
nSiL: 155A Venice
Badger ID: 

Training and Maintenance

Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Check the SNF Training Calendar for any scheduled training.

One shadowing session and a training with tool owner are required. Training sessions are scheduled for 10:30am on the 2nd Wednesday of the month. Please join if you are available. Review the training calendar, or contact the tool owner when confirming the date

Operating Instructions