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Profile of Deposition Techniques at SNF

Project Type: 
nano@stanford Fellowship
Date: 
March 2020
Areas of Interest: 
Deposition
Processing Technique (former Function and Method): 
Deposition
Researchers and (Mentors): 
Samuel Mumford (Maurice Stevens)
List of Important Equipment: 
AJA Evaporator (aja-evap)
Intlvac Evaporator (Intlvac_evap)
Lesker Sputter (lesker-sputter)
PlasmaTherm Versaline HDP CVD System (hdpcvd)
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
Savannah ALD (savannah)
MVD (mvd)
Fiji 1 ALD (fiji1)
Fiji 2 ALD (fiji2)
Fiji 3 ALD (fiji3)
Tylan9 Forming Gas Anneal Furnace (tylan9)
Notes: 
Source: 
Profile of Deposition Techniques at SNF
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