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Function and Method(s):
Atomic Layer Deposition (ALD)
Equipment Used:
AJA Evaporator (aja-evap)
Fiji 1 ALD (fiji1)
Fiji 2 ALD (fiji2)
Fiji 3 ALD (fiji3)
Savannah ALD (savannah)
Related Documentation
Project
ALD Process for Top-Gating 2D Materials
ALD Process for Top-Gating 2D Materials
SOP for Seeded ALD depositions on MOSCAPS and MIMS structures on Silicon
SOP for Seeded ALD depositions on MOSCAPS and MIMS structures on Silicon
PDF File:
Click here to directly access the pdf
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Thursday, August 10, 2023
