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CCP Etchers
ICP Etchers
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Downstream Plasma Etchers
Legacy Dry Etch Equipment Overview
Metallization Equipment
Oxidation and Annealing Equipment
Photolithography Equipment
Wet Bench Equipment
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Function and Method(s):
Dry Etching
Equipment Used:
AMAT P5000 Etcher (p5000etch)
Lam Research TCP 9400 Poly Etcher (lampoly)
Matrix Plasma Resist Strip (matrix)
MRC Reactive Ion Etcher (mrc)
Oxford Dielectric Etcher (oxford-rie)
Oxford III-V etcher (Ox-35)
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Plasmaetch PE-50 (plasma-etch)
STS Deep RIE Etcher (stsetch)
Xactix Xenon Difluoride Etcher (xactix)
Dry Etch Equipment Overview
Dry Etch Equipment Overview
Source:
Dry Etch Equipment Overview
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