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Online Dry Etching Course
CCP Etchers
ICP Etchers
RIE Etchers
Vapor Etchers
Downstream Plasma Etchers
Legacy Dry Etch Equipment Overview
Metallization Equipment
Oxidation and Annealing Equipment
Photolithography Equipment
Wet Bench Equipment
Related Links
Function and Method(s):
Dry Etching
Equipment Used:
AMAT P5000 Etcher (p5000etch)
Lam Research TCP 9400 Poly Etcher (lampoly)
Matrix Plasma Resist Strip (matrix)
MRC Reactive Ion Etcher (mrc)
Oxford Dielectric Etcher (oxford-rie)
Oxford III-V etcher (Ox-35)
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Plasmaetch PE-50 (plasma-etch)
STS Deep RIE Etcher (stsetch)
Xactix Xenon Difluoride Etcher (xactix)
Dry Etch Equipment Overview
Dry Etch Equipment Overview
Source:
Dry Etch Equipment Overview
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