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Vapor Etchers

This is a summary of the vapor etchers.

If you would like to see a summary of etchers for a specific material (i.e. SiOor poly silicon) please visit the materials page.

Dry Etch Equipment Summary

Processing Technique: Vapor Etching
Equipment Name Processing Technique Cleanliness Primary Materials Etched Other Materials Etched Gases Substrate Size Maximum Load Notes
Xactix Xenon Difluoride Etcher (xactix) Vapor Etching All
1

Isotropic Si etching; can be used for backside Si removal on small pieces

SPTS uetch vapor etch (uetch) Vapor Etching All
1

Pieces need a carrier wafer; Isotropic Etching

Last modified: 30 Apr 2020