Plasmaetch PE-50 (plasma-etch)
Overview
The Plasmaetch PE-50 is located in Venice, and is used primarily for surface treatment, for example with PDMS. If you have questions about your process or would like to get trained, please contact Michelle Rincon.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Primary Materials Etched
Process Temperature Range:
Gases
Substrate Sizes
Maximum Load:
Multiple
Notes:
Low power, high pressure plasma; low bias, minimal damage. Often used for surface treatment At SNF - nSiL lab
Lab Facility, Location, and Badger Information
Lab Organization:
Location:
Badger Area:
Badger ID:
plasma-etch
Training and Maintenance
Lab Facility:
Training Charges:
0.50 hours
Primary Trainer:
Primary Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Contact the primary trainer: .
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