Plasmaetch PE-50 (plasma-etch)
Overview
The Plasmaetch PE-50 is located in Venice, and is used primarily for surface treatment, for example with PDMS. If you have questions about your process or would like to get trained, please contact primary trainer.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Primary Materials Etched
Gases
Substrate Sizes
Maximum Load:
Multiple
Notes:
Low power, high pressure plasma; low bias, minimal damage. Often used for surface treatment At SNF - nSiL lab
Lab Organization, Location, and Badger Information
Lab Organization:
Location:
Badger Area:
nSiL: 155A Venice
Badger ID:
plasma-etch
Training and Maintenance
Lab Facility:
Training Charges:
0.50 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Contact the primary trainer: Lavendra Mandyam
