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Lam Research TCP 9400 Poly Etcher (lampoly)

Overview

photo of lampoly etcher in SNF cleanroom

Lam 9400 TCP is a Polysilicon DryEtcher with Envision software; Clean category; for polysilicon and single crystal Silicon etches; maximum etch depth 3um.

Cleanliness: 

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 
25
Notes: 

Single wafer etch with auto-loading from a cassette. Equipment originally used for gate etching with high selectivity to thin gate oxides.

Lab Organization, Location, and Badger Information

Badger Area: 
SNF: Dry Etching
Badger ID: 
lampoly

Training and Maintenance

Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  2. Contact the primary trainer: .