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Tungsten Silicide
Chemical Formula:
WSi
2
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AMAT P5000 Etcher
p5000etch
Clean
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SNF Cleanroom Paul G Allen L107
Si based materials
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2
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C
C
C
dimethylpolysiloxane
poly(p-xylylene)
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Ti
Various C-based
W
WSi
2
PI
Resist
Ti Tungsten
