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Function and Method(s):
Thermal ALD
Equipment Used:
Savannah ALD (savannah)
Metal Nitride Films Using ALD- Final Presentation
Metal Nitride Films Using ALD- Final Presentation
PDF File:
Metal Nitride Films Using ALD- Final Presentation
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Materials
Silicon Nitride (Si3N4)
Hafnium Nitride (HfN)
Thursday, August 10, 2023
