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90°C Oven (oven90)


The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.


Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
90 ºC

Bakes wafers after resist coating.

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to to sign up for the All Litho class. Read more here: All Litho class.
  2. Read the relevant operating procedures:
  3. Contact the primary trainer: .

Operating Instructions