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90°C Oven (oven90)

Overview

The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.

Cleanliness: 

Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
90 ºC
Notes: 

Bakes wafers after resist coating.

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Read the relevant operating procedures:
  3. Contact the primary trainer: .

Operating Instructions