Skip to content
Skip to navigation
SUNetID Login
SUNetID Login
Stanford Nanofabrication Facility
Lab User Guide
Navigation menu
Guide Main Menu
SNF Home
Guide Home
Techniques
Overview
Processing Techniques
Projects
Nano Nuggets
Processes
Runsheets
Safety & Policies
Overview
Lab Manual
1.0 General Policies
2.0 Getting Around
3.0 Safety for All
4.0 General Chemical Safety
5.0 Appendices
Safety Training
SDS
Mavericks (ExFab Room 155) Policies
Prescription Safety Glasses
Training
Overview
Training Calendar
Training Course Online
Training Shadowing Form
Training Videos
Materials
Overview
Chemicals & Materials
Cleanliness Groups
New Process or Material Requests (PROM)
Chemicals List
Materials List
Gases List
Useful Links
Wafer Dopant and Resistivity Specs
Lab Management System (Badger)
Events
Discussion Lists
External Links
Face shield cleaning using steamer
People
Staff List
For Emergencies
Technical Liaisons
Consultants
Equipment
Equipment Name Table
Characterization Equipment
CVD Equipment
Doping Equipment
Dry Etch Equipment
Metallization Equipment
Oxidation and Annealing Equipment
Photolithography Equipment
Wet Bench Equipment
People
Staff List
For Emergencies
Technical Liaisons
Consultants
Gary Sosa
Contact Information
Phone:
(650)725-1685
Office:
Paul G. Allen 144
Email:
gsosa@stanford.edu
About
Lab Organization(s):
SNF
Role:
Maintenance Engineer - Litho
Lithography Area/Wet Benches/Characterization
Trainer for
Oriel Deep UV Exposure Lamp (oriel-duv)
Maintainer for
ASML PAS 5500/60 i-line Stepper (asml)
CytoViva HSI (cytoviva)
EVG 101 Spray Coater (evgspraycoat)
Ex Fab Develop Wet Bench (wbexfab_dev)
Ex Fab Solvent Wet Bench (wbexfab_solv)
Flexus 2320 Stress Tester (stresstest)
Headway 3 Manual Resist Spinner (headway3)
HMDS Vapor Prime Oven, YES2 (yes2)
Hummer V Sputter Coater (hummer)
Karl Suss MA-6 Contact Aligner 1 (karlsuss)
Karl Suss MA-6 Contact Aligner 2 (karlsuss2)
Nanospec 210XP (nanospec2)
Nanospec 3 (nanospec3)
Oriel Deep UV Exposure Lamp (oriel-duv)
Prometrix Resistivity Mapping System (prometrix)
Reflectance Spectrometer Filmetrics F40 (filmetrics)
Sensofar S-neox (s-neox)
SVG Develop Track 1 (svgdev)
SVG Develop Track 2 (svgdev2)
SVG Resist Coat Track 1 (svgcoat)
SVG Resist Coat Track 2 (svgcoat2)
Tencor P2 Profilometer (p2)
Woollam (woollam)
Backup maintenance for
Alphastep 500 Profilometer (alphastep)
DISCO Wafer Saw (DISCO wafersaw)
EV Group Contact Aligner (evalign)
EV Group Wafer Bonder (evbond)
Headway Manual Resist Spinner (headway2)
HMDS Vapor Prime Oven, YES (yes)
Laurell Manual Resist Spinner (laurell-R)
Lithography Solvent Bench (lithosolv)
Mask Scrubber (masksrub)
Optomec Printer (optomec-printer)
Oven 110°C post-bake (oven110)
Oven 90°C prebake (oven90)
Oven BlueM 200°C to 430°C (bluem)
Ultraviolet Photoresist Cure (uvcure)
Wet Bench Clean 1 (wbclean-1)
Wet Bench Clean 2 (wbclean-2)
Wet Bench Clean_res- hotphos (wbclean_res-hotphos)
Wet Bench Clean_res-hf (wbclean_res-hf)
Wet Bench Clean_res-piranha (wbclean_res-piranha)
Wet Bench CMOS Metal (wbclean3) (wbclean3)
Wet Bench Decontamination (wbdecon)
Wet Bench Flexcorr 1 (wbflexcorr-1)
Wet Bench Flexcorr 2 (wbflexcorr-2)
Wet Bench Flexcorr 3 (wbflexcorr-3)
Wet Bench Flexcorr 4 (wbflexcorr-4)
Wet Bench Flexible Solvents (wbflexsolv)
Wet Bench Flexible Solvents 1 (wbflexsolv-1)
Wet Bench Flexible Solvents 2 (wbflexsolv-2)
Wet Bench Miscellaneous (wbmiscres)
Wet Bench Resist Strip (wbresstrip-1)
White Oven (white-oven)
