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Stanford Nanofabrication Facility
Lab User Guide
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1.0 General Policies
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Face shield cleaning using steamer
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Gary Sosa
Contact Information
Phone:
(650)725-1685
Office:
Paul G. Allen 144
Email:
gsosa@stanford.edu
About
Lab Organization(s):
SNF
Role:
Maintenance Engineer - Litho
Lithography Area/Wet Benches/Characterization
Trainer for
Oriel Deep UV Exposure Lamp (oriel-duv)
Maintainer for
Aligner Contact Karl Suss MA-6 (karlsuss)
ASML PAS 5500/60 i-line Stepper (asml)
CytoViva HSI (cytoviva)
EVG 101 Spray Coater (evgspraycoat)
Ex Fab Develop Wet Bench (wbexfab_dev)
Ex Fab Solvent Wet Bench (wbexfab_solv)
Flexus 2320 Stress Tester (stresstest)
Headway 3 Manual Resist Spinner (headway3)
HMDS Vapor Prime Oven, YES2 (yes2)
Hummer V Sputter Coater (hummer)
Karl Suss MA-6 Contact Aligner (karlsuss2)
Nanospec 210XP (nanospec2)
Nanospec 3 (nanospec3)
Oriel Deep UV Exposure Lamp (oriel-duv)
Profilometer AlphaStep D-300 (alphastep2)
Prometrix Resistivity Mapping System (prometrix)
Reflectance Spectrometer Filmetrics F40 (filmetrics)
SEM -Zeiss Merlin (sem-merlin)
Sensofar S-neox (s-neox)
SVG Develop Track 1 (svgdev)
SVG Develop Track 2 (svgdev2)
SVG Resist Coat Track 1 (svgcoat)
SVG Resist Coat Track 2 (svgcoat2)
Tencor P2 Profilometer (p2)
Woollam (woollam)
Backup maintenance for
DISCO Wafer Saw (DISCO wafersaw)
EVG Contact Aligner (evalign)
EVG Wafer Bonder (evbond)
Headway Manual Resist Spinner (headway2)
HMDS Vapor Prime Oven, YES (yes)
Laurell Manual Resist Spinner (laurell-R)
Lithography Solvent Bench (lithosolv)
Mask Scrubber (masksrub)
Optomec Printer (optomec-printer)
Oven (White) (white-oven)
Oven 110°C post-bake (oven110)
Oven 90°C prebake (oven90)
Oven BlueM 200°C to 430°C (bluem)
Profilometer Alphastep 500 (alphastep)
Ultraviolet Photoresist Cure (uvcure)
Wet Bench Clean 1 (wbclean-1)
Wet Bench Clean 2 (wbclean-2)
Wet Bench Clean_res- hotphos (wbclean_res-hotphos)
Wet Bench Clean_res-hf (wbclean_res-hf)
Wet Bench Clean_res-piranha (wbclean_res-piranha)
Wet Bench CMOS Metal (wbclean3)
Wet Bench Decontamination (wbdecon)
Wet Bench Flexcorr 1 (wbflexcorr-1)
Wet Bench Flexcorr 2 (wbflexcorr-2)
Wet Bench Flexcorr 3 (wbflexcorr-3)
Wet Bench Flexcorr 4 (wbflexcorr-4)
Wet Bench Flexible Solvents (wbflexsolv)
Wet Bench Flexible Solvents 1 (wbflexsolv-1)
Wet Bench Flexible Solvents 2 (wbflexsolv-2)
Wet Bench Miscellaneous (wbmiscres)
Wet Bench Resist Strip (wbresstrip-1)
