Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
AJA Evaporator aja-evap |
Evaporator AJA training | Flexible | SNF Exfab Paul G Allen 155A Venice |
For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance |
Lesker Sputter lesker-sputter |
Sputter Lesker 1&2 Training | Flexible | SNF Exfab Paul G Allen 155A Venice |
reactive O2/N2 sputtering, substrate bias, substrate heating, co-sputter |
Aixtron MOCVD - III-V system aix200 |
MOCVD - III-V Aixtron training | Flexible | SNF MOCVD Paul G Allen 213XA |
N and P doping available. |
PDS 2010 LABCOTER™ 2 Parylene Deposition System parcoater |
Parylene Coater Training | Flexible | SNF Exfab Paul G Allen 155 Mavericks |
Equipment name & NEMO ID | Technique | Cleanliness | Primary Materials Etched | Developer | Chemicals | Gases | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|
Wet Bench Miscellaneous wbmiscres |
Flexible |
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Wet Bench Solvent Lithography lithosolv |
Flexible |
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Woollam woollam |
All |
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1 | ||||||
Xactix Xenon Difluoride Etcher xactix |
All |
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1 |