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Mary Tang

Contact Information

Phone:

(650)723-9980

Office:

Paul G. Allen 141

Contact Mary Tang by email

About

Lab Organization(s):

SNF

Role:

SNF Managing Director

Technical Liaison for:

Biological/chemical analysis, MEMS, Microfluidics

Trainer for

AFM-Asylum (afm-asylum)

Digital Instruments AFM Nanoscope Dimension 3000 (afm2)

Drytek 100 Plasma Etcher (drytek2)

Lam Research TCP 9400 Poly Etcher (lampoly)

PlasmaTherm Shuttlelock PECVD System (ccp-dep)

SPF Measurement Bench ()

STS Plasma Enhanced CVD (sts)

Thermolyne (thermolyne)

Wet Bench Germanium (wbgen2)

Backup trainer for

EV Group Wafer Bonder (evbond)

Gasonics Aura Asher (gasonics)

Matrix Plasma Resist Strip (matrix)

SPTS uetch vapor etch (uetch)

Wet Bench Clean 1 (wbclean-1)

Wet Bench Clean 2 (wbclean-2)

Wet Bench Flexcorr 1 (wbflexcorr-1)

Wet Bench Flexcorr 2 (wbflexcorr-2)

Wet Bench Flexcorr 3 (wbflexcorr-3)

Wet Bench Flexcorr 4 (wbflexcorr-4)

Wet Bench Flexible Solvents (wbflexsolv)

Wet Bench Flexible Solvents 1 (wbflexsolv-1)

Wet Bench Flexible Solvents 2 (wbflexsolv-2)

Xactix Xenon Difluoride Etcher (xactix)

Maintainer for

SPF Measurement Bench ()

Thermolyne (thermolyne)

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