ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Nitric Acid and Sulfuric Acid for Oxygen Termination of Diamond | 05/20/2021 | Request for heated acid manual processing. | Request approved. | |
| Savannah Al2O3 ALD on samples with exposed BiFeO3 and SrRuO3 | 05/17/2021 | Request for non-standard materials in Savannah. | Savannah ALD (savannah) | Request approved. Please see process staff for details. |
| 70-nm-thick Al2O3 ALD deposition by Fiji-1 in SNF | 05/13/2021 | Request for depositon that is thicker than allowed. | Request approved. | |
| PT-DSE etching of silicon to undercut lithium niobate structures | 05/13/2021 | Request documenting data collection to enable LiNb processing on PT-DSE | Request approved | |
| Stress Testing with temperature cycling | 05/04/2021 | Request to use the temperature capabiities of the Flexus. | Flexus 2320 Stress Tester (stresstest) | Request approved. |
| Returning Si/SOI (Si-on-insulator) to Clean Group for CMOS FEOL after UV | 05/04/2021 | Cleanliness category exception documented. | Request approved. Please see process staff for details. | |
| Use of Photoresist MIR701 in SNF | 04/20/2021 | Request to bring new resist in to SNF. | Request approved. Please see process staff for details. | |
| Proprietary resist use in SNF | 04/20/2021 | Request to use proprietary formulation in SNF litho tools. | Request approved. Please see process staff for details. | |
| Absorption Spectroscopy of Y-27632 | 04/16/2021 | Request to bring wet chemicals into Ocean (151) | Jasco UV-Vis-NIR (jasco-uv-vis-nir) | Request approved. |
| Request to use SOG in SNF | 04/08/2021 | Process flow documentation for SOG in SNF | Headway Manual Resist Spinner (headway2) | Request approved. |
