ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Request for processing of sealed silicon particles in SNF | 11/23/2021 | Request to bring loose nanomaterials into cleanroom inside sealed container and process in furnace. | Request approved. | |
| SOP- polyacrylonitrile nanoparticles in zetasizer | 11/19/2021 | SOP for Malvern use in Mavericks. | Request approved. | |
| Personal SU-8 2100 for use in SNF | 11/19/2021 | Request for personal SU-8 chemical. | Request approved. | |
| Low Termperature ALD process in MVD | 11/11/2021 | New process for MVD tool. | Request approved. Please see process staff for details. | |
| Use of MasterSilLO 971 in Mavericks | 11/08/2021 | New PDMS for use in Room 155 PDMS workbench | Request approved. | |
| Request for SnTe target in Lesker Sputter | 11/03/2021 | New target for use in SNF (ExFab) Lesker | Request approved. | |
| Nanoporous Glass Etching | 10/28/2021 | Process and chemicals request. | Request approved. | |
| Use of Omnicoat | 10/25/2021 | Personal chemical request for use in SNF. | Request approved. Please see process staff for details. | |
| Nickel wet etch off semi-clean silicon | 10/14/2021 | Process flow for semi-clean etch. | Request approved. Please see process staff for details. | |
| Nickel wetch etch off semi-clean silicon | 10/14/2021 | Process flow for semi-clean etch. | Request approved. Please see process staff for details. |
