How to use this guide:
Labmembers may use TMAH as for conventional, anisotropic etching of silicon, but must register their use with the ProM committee. This entitles the labmember to use TMAH for the duration of their project under this PI or organization. When the PI or organization changes, the labmember should re-register. This is accepted as acknowledgement by the PI or organization of this process decision. TMAH users must have a buddy when processing and both must fill out, sign and return the TMAH checklist to the ProM (attached.)
Our obejctives are to ensure:
1. the labmember is aware of the safety hazards and is fully trained in processing with TMAH.
2. due diligence, that other alternatives have been considered.
In addition to regular training on the WBFlexCorr wet bench, the labmember must review the EHS TMAH Fact sheet on the EH&S reference site and discuss with a staff member.