ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Use of Lift Off Resist PMGI SF9 | 12/15/2021 | Request for personal LOR in SNF. | Request approved. Please see process staff for details. | |
| Nitric Acid Wet Etching for Selective Removal of Ag from Ag-Au alloys | 12/14/2021 | Request for new process. | Request approved. | |
| Perovskite etching of BTO, STO, and KTO | 12/14/2021 | Etch of BTO, STO, and KTO perovskites in MRC. | Request approved for MRC only. | |
| Diazonium use in Mavericks | 12/14/2021 | Chemical process to be performed in Mavericks. | Request approved. Please see process staff for details. | |
| Etching of BTO and STO in MRC etcher | 12/14/2021 | Etch of BTO and STO in MRC. | Request approved. Please see process staff for details. | |
| Perminex 1000 Series | 12/14/2021 | Use of SU-8 like personal chemical in SNF. | Request approved. Please see process staff for details. | |
| BCB use for wafer bonding and subsequent polishing | 12/13/2021 | Use of new bonding chemical in SNF. | Request approved. Etch restricted to Ox-RIE. | |
| Grinding, polishing, annealing, wet chemistry clean of Potassium Tantalate Crystals | 12/02/2021 | Use of non-standard materials on CMP gold contaminated equipment. | Request approved. | |
| Grinding, polishing, annealing, wet chemistry clean of Barium Titanate Crystals | 12/02/2021 | Use of non-standard materials on CMP gold contaminated equipment. | Request approved. | |
| Grinding, polishing, annealing, wet chemistry clean of Strontium Titanate Crystals | 12/02/2021 | Use of non-standard materials on CMP gold contaminated equipment. | Request approved. |
