ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Gallium in Room 155 Sonicator | 07/22/2021 | Request to bring Ga into 155 and documentation of procedures for use with the sonicator. | Request approved. | |
| Cu-containing wafer processing on ccp-dep | 07/15/2021 | Request to modify contamination protocols to allow wafer processing on ccp-dep with minimal amounts of exposed Cu. | Request approved with additional precautions. Please see process staff for details. | |
| IP-n162 Resin for Nanoscribe | 07/13/2021 | Request for new personal resin to use with Nanoscribe. | Request approved. | |
| Process flow to go from savannah to thermconitride | 07/13/2021 | Request to go from flexible tool to clean tool. | Request approved with additional precautions. Please see process staff for details. | |
| Spin on dopant for creating p-n junctions in silicon | 07/06/2021 | Request for bringing in new chemicals and definining process flow | Request approved. | |
| SU-8 and shaker table use | 07/06/2021 | Request to bring in personal chemicals as well as personal shaker table. | Request approved. Please see process staff for details. | |
| Standard operating procedure for liquid electrochemical cell | 06/09/2021 | Request for group to purchase liquid electrochemical cell for Woollam, and documentation of procedures for installation and un-installation | Request approved. | |
| HD4110 photoresist and Cyclopenanone in SNF | 06/04/2021 | Request for new resist and solvent in SNF. | Request approved. | |
| TDUR Photoresist Use in SNF | 06/03/2021 | Request for new resist in SNF labs. | Request approved. Please see process staff for details. | |
| Request for use of hydrogel-based photoresist (NIPAM) | 05/25/2021 | Request for new resist formulation in SNF | Request approved. |
