ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Block copolymer etch in lampoly | 04/07/2021 | Non-standard material etch in clean tool in SNF | Lam Research TCP 9400 Poly Etcher (lampoly) | Request approved. |
| Use of Toluene in Sylgard 184 at PDMS Workbench | 04/01/2021 | Non-standard PDMS processing in Mavericks | PDMS Workbench () | Request approved. |
| Use of BCB on Heidelberg | 03/25/2021 | Request to bring in new chemistries for use on Heidelberg. | Heidelberg MLA 150 (heidelberg) | Request approved. Please see process staff for details. |
| Bonder test with pressure testing paper | 03/22/2021 | Request to bring new materials into evbonder | EVG Wafer Bonder (evbond) | Request approved. |
| Centriguation of CNT Solution | 03/16/2021 | Request to process CNT in solution in Mavericks | Fisher Accuspin 24C (centrifuge) | Request approved. |
| PMMA (950K and 495K) for 155 Glovebox Spincoating | 03/15/2021 | Chemical request and SOP for Mavericks glovebox. | Glovebox-l (glovebox-l) | Request approved. |
| SOP for FeOx Nanoparticle evaluation in DLS | 03/08/2021 | SOP for DLS procedure in Mavericks. | Malvern Dynamic Light Scattering (DLS) Zetasizer (malvern-dls) | Request approved. |
| Removal of LOL layer coated with cobalt nanoparticle containing block copolymer | 03/05/2021 | Request to use new chemistries in the wafer saw bench. | Request approved. Please see process staff for details. | |
| SOP for silanization with trimethychlorosilane in Mavericks | 03/04/2021 | Silanization of PDMS molds required liquid method. | Request approved with dedicated equipment purchase and approved installation. | |
| Use of polystyrene suspension in Laurell Manual Resist Spinner | 02/11/2021 | Request to suspend and spin Au nanoparticles in spinner outside of cleanroom. | Laurell Manual Resist Spinner (laurell-R) | Request approved. |
