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Savannah Al2O3 ALD on samples with exposed BiFeO3 and SrRuO3

PROM Request Title: 
Savannah Al2O3 ALD on samples with exposed BiFeO3 and SrRuO3
PROM Request Summary: 
Request for non-standard materials in Savannah.
PROM Date: 
05/17/2021
PROM Decision: 
Request approved. Please see process staff for details.
Equipment List: 
Savannah ALD (savannah)
Materials: 
Bismuth Ferrite (BiFeO3)
Strontium Ruthenium Oxide (SrRuO)