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Savannah Al2O3 ALD on samples with exposed BiFeO3 and SrRuO3
PROM Request Title:
Savannah Al2O3 ALD on samples with exposed BiFeO3 and SrRuO3
PROM Request Summary:
Request for non-standard materials in Savannah.
PROM Date:
05/17/2021
PROM Decision:
Request approved. Please see process staff for details.
Equipment List:
Savannah (savannah)
Materials:
Bismuth Ferrite (BiFeO
3
)
Strontium Ruthenium Oxide (SrRuO
)
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