Tylan9 Forming Gas Anneal Furnace (tylan9)
Overview
The top furnace in TylanBank1 is the Tylan9 Furnace.
SNF staff
This furnace will be shut down from 8/21/23 - 8/23/23 and the final shutdown will be on 3/1/24. It will be permanently removed from the cleanroom and replaced by a new Tystar furnace in March 2024. Find the current project schedule and more information here.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Lab Supplied Materials
Process Temperature Range:
250 °C - 1100 °C
Gases
Substrate Type
Substrate Sizes
Maximum Load:
50
Notes:
Any material that won't vaporize is okay. N2 and Ar annealing available.
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
SNF: Annealing, Oxidation and Doping
NEMO ID:
tylan9
Training and Maintenance
Lab Facility:
Training Charges:
1.00 hours
Primary Trainer:
Primary Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Contact the primary trainer: Neel Mehta
