Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
Fiji 1 ALD fiji1 |
ALD Fiji 1 and 2 Training | Semiclean | SNF Cleanroom Paul G Allen L107 |
Equipment name & NEMO ID | Technique | Cleanliness | Primary Materials Etched | Gases | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|
Xactix Xenon Difluoride Etcher xactix |
All |
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