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Atomic Layer Deposition of Aluminum Doped Zinc Oxide

Project Type: 
E241
Date: 
December 2015
Areas of Interest: 
Creating Al doped ZnO on the Savannah ALD
Report(s): 
Atomic Layer Deposition of Aluminum Doped Zinc Oxide- Final Report
Processing Technique (former Function and Method): 
Atomic Layer Deposition (ALD)
Researchers and (Mentors): 
Jiheng Zhao, Sidi Huang, Sangwook Park, (Michelle Rincon)
List of Important Equipment: 
Savannah ALD (savannah)
Presentation(s): 
Atomic Layer Deposition of Aluminum Doped Zinc Oxide- Final Presentation