ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
PROM Request Title |
PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| 1200OS Primer in Room 155 | 10/18/2018 | Use of 1200OS Primer in ExFab Mavericks | Request approved. Please see process staff for details. | |
| 20200207 A. Piazza- HFE7100 for use in wbflex-solv | 02/07/2020 |
Request to bring in new chemistry for use with nanoscribe resists |
Wet Bench Flexible Solvents 1 (wbflexsolv-1) | Approved. |
| 2020026 Bring Titanium Etchant TFTN to use in SNF | 02/26/2020 | Use of new chemistry for Ti Etch in SNF. | Approved. | |
| 3M Novec 73DE for Epoxy Bonding | 07/10/2018 | Use of 3M Novec 73DE as a substitute for TCE for cleaning. | Request approved. Please see process staff for details. | |
| 70-nm-thick Al2O3 ALD deposition by Fiji-1 in SNF | 05/13/2021 | Request for depositon that is thicker than allowed. | Request approved. | |
| A-061m Cu Etchant | 06/13/2017 | New chemistry for use in SNF. | Request approved. Please see process staff for details. | |
| Absorption Spectroscopy of Y-27632 | 04/16/2021 | Request to bring wet chemicals into Ocean (151) | Jasco UV-Vis-NIR (jasco-uv-vis-nir) | Request approved. |
| Adhesion Promoter for Nanoscribe IP Resists | 03/13/2019 | Request to bring 3-(Trimethoxysilyl)propyl methacrylate in as adhesion promoter for Nanoscribe. |
Nanoscribe Photonics GT (nanoscribe), Wet Bench Flexcorr 3 (wbflexcorr-3) |
Request approved. Please see process staff for details. |
| Al2O3 ALD on K(Co)-doped BaFe2As2 | 02/18/2015 | Request to introduce new materials into SNF. | Fiji 3 ALD (fiji3) | Request approved for Fiji2 at temperatures below 180C. |
| Al2O3 ALD on TMD in MVD Savannah | 04/13/2015 | Request to do Al2O3 capping of exoliated TMD structures in an inert environment. | Request approved. |
