Thermco3 Oxidation Furnace (thermco 3)
The top furnace in Thermco bank2 is the Thermco3 Furnace.
Capabilities and Specifications
Material Thickness Range: 25.0 Å - 2.0 μm
Process Temperature Range:
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.
Lab Organization, Location, and Badger Information
SNF: Annealing, Oxidation and Doping
Training and Maintenance
Steps to become a tool user
Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF