Equipment Moves & Changes
| Tool | New Normal Changes |
|---|---|
| Prometrix Resistivity Mapping System (prometrix) |
This is a small room, so by default, occupancy limits remain to allow 6' distancing for those who wish. So unless arrangements are made, reserve the Prometrix and verify the Woollam or S-neox are not occupied at the same time. |
| Savannah ALD (savannah) |
Please be aware that the RTAs are less than 6' away from the Savannah during loading and unloading. Please make sure to check for RTA reservations and work out the timing details with other users to maintain social distancing. |
| SEM -Zeiss Merlin (sem-merlin) |
General New Normal Policies apply. |
| Solidscape Wax 3D Printer (3d-wax-printer) |
New location! It has been moved out of Mavericks (Room 155) and into Ocean (Room 151) |
| SVG Resist Coat Track 1 (svgcoat) |
SVGcoat computers have been rearranged. SVGcoat1(front track) computer is now on the right side of track system. |
| SVG Resist Coat Track 2 (svgcoat2) |
SVGcoat computers have been rearranged. SVGcoat2(back track) computer was moved but remain on left side of the track |
| Tystar Bank 1 Tube 1 (B1T1 Flexible Oxide) |
General New Normal Policies apply. |
| Tystar Bank 1 Tube 2 (B1T2 Flexible Oxide Anneal) |
General New Normal Policies apply. |
| Tystar Bank 2 Tube 5 (B2T5 Clean Oxide Anneal) |
General New Normal Policies apply. |
| Tystar Bank 2 Tube 6 (B2T6 Clean Oxide) |
General New Normal Policies apply. |
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Last modified: 6 Jun 2020
