PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
---|---|---|---|---|
Use of Santovac5 for thermal contact in Plasma Etch (gold systems) | 09/18/2013 | Experiments performed to identify feasibility of Santovac5 for thermal contact in gold plasma etchers. | MRC Reactive Ion Etcher (mrc) | Recommendations for use included in PROM form. |
BiVO4 in Fiji2 | 10/24/2013 | Request to bring in BiVO4 films to process in Fiji2 | Fiji 2 ALD (fiji2) | Approved. Committee notification required if BiVO4 preparation procedures change. |
CdS in Fiji2 | 11/08/2013 | Request to bring in CdS pieces to process in Fiji2 | Fiji 2 ALD (fiji2) | Approved with special handling requirements. |
Epoxy Permanent Resist version 167 | 11/21/2013 | Request to bring in MicroChem Epoxy Permanent Resist v. 167 | Approved. | |
Epoxy Permanent Resist version 168 | 11/21/2013 | Request to bring in MicroChem Epoxy Permanent Resist v. 168 | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information. | |
PCB and Ceramic Adhesive | 12/04/2013 | Request to process Printed Circuit Board and ceramic adhesive in Fiji2 | Fiji 2 ALD (fiji2) | Approved. Samples require vacuum bake prior to ALD. |
Potassium Dichromate (K2Cr2O7) Solution | 12/04/2013 | Request to bring in Potassium Dichromate (K2Cr2O7) chemistry | Wet Bench Flexcorr 1 (wbflexcorr-1) | Approved. |
EE342 Piezoelectric AlN/Mo stack | 12/06/2013 | Documentation of EE342 process | No approval required. Form submitted for documentation purposes. | |
Microchem Remover PG | 12/12/2013 | Inquiry to store new 4L bottle of Microchem Remover PG | Approved. Mahnaz provided yellow label for bottle. | |
MgO Substrate in Fiji2 | 12/12/2013 | Request to use MgO substrate in Fiji2 |
Fiji 2 ALD (fiji2), Woollam (woollam) |
Approved. |