Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Manual wet etching of non-standard materials using only SNF approved acids or bases. Hot plate available. GaAs allowed in personal labware only.
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Flexible |
SNF Cleanroom Paul G Allen L107 |
Magnetically Enhanced RIE (MERIE) |
AMAT P5000 Etcher p5000etch |
P5000 is a magnetically enhanced reactive ion etching system (MERIE) for etching silicon based dielectrics (silicon dioxide, silcon nitride, etc.). P5000 is currently classified as CMOS restricted.
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Clean, Clean (Ge), Semiclean |
SNF Cleanroom Paul G Allen L107 |