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Deep Oxide Etch in PT-Ox to Replace Dicing and Polishing Process

Project Type:

E241

Date:

June 2015

Areas of Interest:

Etch process to replace dicing and polishing for photonic waveguide testing

Function and Method:

Researchers and (Mentors):

Alex Piggott, (Usha Raghuram)

List of Important Equipment:

Presentation(s):

Report(s):

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