Low Vapor Pressure Precursor Delivery: A Case Study in MLD of Polyimide
Project Type:
E241
Date:
June 2015
Areas of Interest:
Process development for polyimide MLD, Savannah thermal management understanding
Processing Technique (former Function and Method):
Researchers and (Mentors):
Tim English, (J Provine), (Michelle Rincon)
List of Important Equipment:
