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Function and Method(s):
Atomic Layer Deposition (ALD)
Equipment Used:
MVD (mvd)
Savannah ALD (savannah)
Low Vapor Pressure Precursor Delivery: A Case Study in MLD of Polyimide- Final Report
Low Vapor Pressure Precursor Delivery: A Case Study in MLD of Polyimide- Final Report
PDF File:
Low Vapor Pressure Precursor Delivery: A Case Study in MLD of Polyimide- Final Report
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Thursday, August 10, 2023
