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Function and Method(s):
Downstream/Remote Plasma Resist Removal
Downstream/Remote Plasma Etching
Equipment Used:
Plasmaetch PE-50 (plasma-etch)
Plasmaetch PE-50 Operating Instructions
Plasmaetch PE-50 Operating Instructions
PDF File:
plasmaetch_pe-50_operation_manual_joanna.pdf
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Thursday, August 10, 2023
