The "Clean" cleanliness group is part of the SNF/ExFab contamination policy.
The following is a list of equipment that fall into the "Clean" category.
Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
Thermco3 Oxidation Furnace thermco 3 |
Thermco 3 Oxidation Furnaces Training | Clean | SNF Cleanroom Paul G Allen L107 |
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available. |
Tylanfga Forming Gas Anneal Furnace tylanfga |
Forming Gas Anneal Furnace Training | Semiclean | SNF Cleanroom Paul G Allen L107 |
For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information. |
RTA AllWin 610 aw610_l |
AllWin 610 RTA Training | Clean | SNF Cleanroom Paul G Allen L107 | |
Tencor P2 Profilometer p2 |
Tencor P2 Profilometer Training | Clean, Semiclean | SNF Cleanroom Paul G Allen L107 |
Step height measurement range 500 Å to 80 µm |
Equipment name & NEMO ID | Technique | Cleanliness | Primary Materials Etched | Process Temperature Range | Chemicals | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|
Wet Bench Clean_res-piranha wbclean_res-piranha |
Clean |
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Wet Bench CMOS Metal wbclean3 |
Semiclean |
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25 wafers | |||||
Wet Bench Decontamination wbdecon |
Clean |
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Wet Bench Resist Strip wbresstrip-1 |
Clean (Ge), Semiclean, Flexible |
20 °C - 60 °C
|
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25 4 inch wafers |