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Use of Crystalbond 555 in Lampoly

PROM Request Title: 
Use of Crystalbond 555 in Lampoly
PROM Request Summary: 
Request to use Crystal Bond 555 to mount chips on wafer in Lampoly etcher.
PROM Date: 
07/15/2014
PROM Decision: 
Conditional approval. Crystal Bond use requires additional characterization and procedure definition. Alternatives proposed.
Link to PROM Request and supporting documentation: 
Use of Crystalbond 555 in Lampoly
Equipment List: 
AMAT P5000 Etcher (p5000etch)
Lam Research TCP 9400 Poly Etcher (lampoly)