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Low-T, High-K, Dielectrics for Transparent and Flexible 2-Dimensional Electronics

Project Type: 
E241
Date: 
December 2015
Areas of Interest: 
Creating Low-T, High-K devices including ALD directly onto flexible, transparent substrate and subsequent processing
Report(s): 
Low-T, High-κ Dielectrics for Transparent and Flexible 2-Dimensional Electronics- Final Report
Processing Technique (former Function and Method): 
Atomic Layer Deposition (ALD)
Researchers and (Mentors): 
Kirby Smithe, (Michelle Rincon)
List of Important Equipment: 
MVD (mvd)
Savannah ALD (savannah)
Presentation(s): 
Low-T, High-κ Dielectrics for Transparent and Flexible 2D Electronics- Final Presentation