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Stanford Nanofabrication Facility
Lab User Guide
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1.0 General Policies
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Face shield cleaning using steamer
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Elmer Enriquez
Contact Information
Phone:
(650)725-3690
Office:
Paul G. Allen 145
Email:
elmere@stanford.edu
About
Lab Organization(s):
SNF
Role:
Maintenance Engineer - Dry Etching
Trainer for
Minitech-GX Micromill (micromill)
Maintainer for
AMAT P5000 Etcher (p5000etch)
DISCO Wafer Saw (DISCO wafersaw)
Finetech Lambda (flipchipbonder)
Gasonics Aura Asher (gasonics)
Lam Research TCP 9400 Poly Etcher (lampoly)
Matrix Plasma Resist Strip (matrix)
Minitech-GX Micromill (micromill)
MRC Reactive Ion Etcher (mrc)
Oxford Dielectric Etcher (oxford-rie)
Oxford III-V etcher (Ox-35)
Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
PlasmaTherm Shuttlelock PECVD System (ccp-dep)
PlasmaTherm Versaline HDP CVD System (hdpcvd)
Samco PC300 Plasma Etch System (samco)
STS Deep RIE Etcher (stsetch)
Technics Asher (technics)
Xactix Xenon Difluoride Etcher (xactix)
