Wafer Prime (HMDS)
| Equipment name & Badger ID | Location | Image | Overview | Link to Training |
|---|---|---|---|---|
|
HMDS Vapor Prime Oven, YES yes |
SNF Cleanroom Paul G Allen L107 |
|
The YES prime oven dehydrates the wafers at 150ºC and primes the wafers using HMDS (Hexamethyldisilazane) allowing better coverage and adhesion between oxides and resists.Read more |
YES Prime Oven Training |
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HMDS Vapor Prime Oven, YES2 yes2 |
SNF Exfab Paul G Allen 104 Stinson | Exfab YES2 HMDS oven training |
