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Wafer Prime (HMDS)

Equipment name & Badger ID Location Image Overview Link to Training
HMDS Vapor Prime Oven, YES
SNF Cleanroom Paul G Allen L107

The YES prime oven dehydrates the wafers at 150ºC and primes the wafers using HMDS (Hexamethyldisilazane) allowing better coverage and adhesion between oxides and resists.Read more

YES Prime Oven Training
HMDS Vapor Prime Oven, YES2
SNF Exfab Paul G Allen 104 Stinson Exfab YES2 HMDS oven training