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Stepper

Equipment name & Badger ID Location Image Overview Link to Training
ASML PAS 5500/60 i-line Stepper
asml
SNF Cleanroom Paul G Allen L107

The ASML PAS 5500/60 stepper is an i-line system with automatic 100mm* wafer cassette processing capability. Using 365nm near-UV light this stepper is capable of a minimum feature size of...Read more

ASML PAS 5500/60 i-line Stepper Training